In this report, it is analyzed that the precision drilling of ceramics can be done by using a new ultrasonic superposition vibration cutting of ultrasonically vibrated ceramics (USVC). And this analytical results can be confirmed by the experiments using a new vibration cutting devices with the 50 Hz electro-hydraulic power device, ultrasonically vibrated core drill and ceramics. The main results are as follows : (1) It has been verified that precise holes of ceramics can be machined by a new ultrasonic superposition vibration drilling of ultrasonically vibrated ceramics in the lower cutting resistance and more efficient that the conventional drilling or the conventional vibration drilling. (2) It is considered that the torsional ultrasonic vibration core drill is suitable for high accuracy drilling of ceramics and the longitudinal ultrasonic vibration core drill is suitable for high efficient drilling of ceramics. (3) It is believed that this research will contribute to development of a quite new drilling machine for high accuracy and efficient drilling of ceramics.