抄録
Following the precision machining method with a control system ( Workpiece-Referred Form Accuracy Control: WORFAC ) proposed in the previous report, in this report the system and an experiment with an in-process measurement sensor, K-HIPOSS, and a parallel leaf-spring micro-tool servo are described. Comparing to the standard HIPOSS model, K-HIPOSS features a long working distance and a wide dynamic range of about 6μm, so that it is more suitable for in-process measurement. A parallel leaf-spring micro-tool servo uses a piezoelectric actuater to drive the diamond tool, of which displacement is detected by the strain-gauges on the leaf-springs. This strain signal is used for compensating the hysteresis of a piezo electric stack and improving the motion performance of a feedback loop. The WORFAC experiment was applied to a simple plane-mirror turning and the result demonstrated its perfect compensation for disturbances.
