A coordinate measuring system with two target-tracking laser interferometers is developed. Each interferometer measures the radial distance between the corner point of a target cornercube mirror and the rotation center of the tracking. 2 D coordinate value of the corner point is computed from these radial distances and a priori known distance between the rotation centers. Experimental comparisons between the system developed and a commercial coordinate measuring machine (CMM) shows that the accuracy of the coordinate measurement in the system is better than 1 μm, regardless of the absolute distances. The problems of the present system and the extension of the system to three-dimensional measurement are discussed.
