超小型放電加工機の開発

抄録

As electrode feeding mechanisms of conventional electro-discharge machines for micro holes consist of ball screws, gears and motors, they are large. This proposed electro-discharge machine is miniaturized to dimensions of 18×14×68 mm because its electrode feeding mechanism consists of an actuator, which can move by bits, utilizing rapid deformations of piezoelectric elements (Impact Drive Mechanism). Its step is variable and the step of 0.02 μm can be obtained easily. The machining performance of this machine is as good as that of the conventional ones Some applications of the developed electro-discharge machine are proposed.