極薄板の平面研削における寸法・形状生成機構の研究

抄録

In this report investigated is the size and form generation mechanism of very thin workpiece in surface grinding. Main conclusions obtained are as follows; (1) In surface grinding of a very thin workpiece the thermal deformation of chuck can not be neglected because the chuck temperature rises as the grinding heat flowing from workpiece back surface into chuck increases. (2) The size generation mechanism is dominated by the variation of total thermal deformation which is given as the sum of thermal deformations of chuck and workpiece. (3) Lift-up phenomenon takes place at the edge of workpiece width which is departed from the chuck surface by the workpiece curvature after grinding. (4) The concavity of actual workpiece profile is generated by the variation of total thermal deformation with workpiece width taking account of the lift-up phenomenon.