改良逐次3点法による直線運動精度の計測
1993 年 59 巻 5 号 p. 773-778
詳細
1993 年 59 巻 5 号 p. 773-778
The purpose of the paper is to realize precise measurement of straight motion accuracy over long travel. The reversal method as well as the sequential three-point method is conventional. However, it is difficult to measure motion accuracy over long travel precisely using either method. The paper proposes a new precise measuring method which will be called the improved sequential three-point method. In this method, the principles of the reversal method and the sequential three-point method are introduced. Straight motion accuracy of a slide table was measured over 850mm travel using the improved sequential three-point method. The standard deviations from 12times measurements were 1.0μm in horizontal position and 2.0arc sec in yaw angle.
