ラッピングにおける砥粒粒径分布推移のシミュレーション

抄録

Abrasive grains are generally crushed in a lapping process, resulting in the change of grain size and its distribution with lapping time. In this paper, a method is proposed to simulate the time-dependent distribution of the size of abrasive grains in lapping. The simulated results are compared with experimentally obtained results. The main results are as follows ; (1) The distribution of the abrasive grain size is successively expressed by the equation (7) in the text. (2) The distribution is mainly determined by the following three parameters, a fracture onset probability P, a multiplication rate r and a transition probability q. (3) The simulated distributions are almost the same as experimentally obtained ones. Therefore, it can be concluded that the method for the simulation is correct in principle. (4) For more precise simulation, more adequate values of the fracture onset probability must be used, which can be obtained from the measurement of the mean size of abrasive grains.