うねりの小さい表面凹凸の三次元測定における試料姿勢制御(第1報)
基本的な考え方
1994 年 60 巻 4 号 p. 549-553
詳細
1994 年 60 巻 4 号 p. 549-553
This paper presents the theoretical foundation of the two new techniques which correct the orientation of specimen surfacein area of5.6mm×5.6mm to measure three-dimensional rough surface. These techniques control the orientation of center plane such that roughness profiles situatewithin the measuring range by using profile data of small area. The basic process is to know the orientation of center plane by two center lines of roughness profiles. One of two named as the method I uses two measuring lines perpendicular to each other, and another named as the method II uses two parallel measuring lines. This paper gives the algorithm to get their optimum measuring lengths.
