圧電セラミックセンサによる研磨加工中の監視 (第1報)

加工条件と発生音響の関係

抄録

This paper deals with a monitoring method for lapping process. First, a lapping jig was newly proposed, taking account of loading the piezoelectric ceramic sensor and the electric circuit and applying to a conditioning ring type lapping machine, in order to detect acoustic emissions caused by mechanical actions of abrasives. Specific power peak level in the acoustic frequency region from 1 kHz to 3 kHz was found to be sensitive to changes of lapping conditions. Then, optical glass BK7 and carbon steel S45C as work materials were lapped with the slurry of SiC abrasives suspended in water and cast iron lap, and the measurement of specific power level was carried out. When using the finer abrasives, the lower level was obtained. And when abrasives were crushed down with elapsed lapping time, the power level also decreased. Meanwhile, high power level was detected when the coarse abrasives were added in slurry. Rather higher power level appeared under lower lapping speed and high pressure conditions. Moreover, the power level is closely connected with the surface roughness as a mark of stock removal, and it was evident that the surface roughness on lapped works could be given by measuring the power level on lapping. Consequently, there is a sufficient prospect for establishing the monitoring method in lapping by using piezoelectric ceramic sensor.