延性モード切削加工用の超精密変位台の開発

抄録

In order to correct the defects of the conventional ultraprecision tables, the ultraprecision table with a machined point control type was newly developed and the ductile mode cutting for brittle materials was achieved. The table which is subject to Abbe's principle in the vertical cutting direction consists of a piezoelectric actuator and a laser measuring system as the feedback sensor. In the horizontal feed direction it is moved by a DC servomotor and steel-belt. Its vertical positioning resolution is 5 nm, the straightness is 10 nm in the 100 mm stroke and the static rigidity is infinite by a PI-D control, but the dynamic rigidity is a little poor due to mechanical resonance. The silicon cutting test using this table shows a good result which can discriminate between the ductile mode cutting and brittle mode cutting by use of an AE sensor and cutting resistance ratio.