1999 年 65 巻 10 号 p. 1445-1449
This paper deals with an stage for a scanning probe microscope (SPM) by using a Stewart platform type parallel mechanism with 6 degrees of freedom. Stacked piezoelectric actuators are used to change link length in a prototype. The movable range of the prototype is 100μ in the x and y directions and 201tm in the z direction. The resonant frequency of the prototype is 100 Hz in the x and y direction and 75 Hz in the z direction approximately. The table motion is controlled by the induced charge feedback control to allow compact SPM designs. The motion error is 16 nm in the z direction by the induced charge feedback control. The displacement of the prototype can be controlled by the induced charge feedback control as well as by the displacement feedback control. This stage is applied to a positioning device of an atomic force microscope (AFM). The grooves of a diffraction grating are observed with good linearity. The prototype can be used for the positioning device of the AFM.