微細形彫放電加工によるマイクロ部品形状測定用探針の製作

X型及びX-Z型探針の製作

抄録

Due to the advancement of micromachine technology, development of measuring method for both profile and dimension of microparts has been strongly demanded. One of the methods available for this is a small three-dimensional profile measuring apparatus with microprobe. For this purpose, fabrication technology of probes that have optimal shape for individual part measurement must be developed. In this research, micro electrical discharge machining which has extremely small machining force and is applicable for fabrication of various type probes, has been used. X type and X-Z type probes which are installed to the small three dimensional profile measuring apparatus based on principle of STM (scanning tunneling microscopy) are made by proposed method using micro die-sinking electrical discharge machining. The relation of electrode and probe profile and measuring results obtained by the probe fabricated are described also.