2001 年 67 巻 12 号 p. 1976-1980
The feasibility for fabricating a magneto-optical rotary encoder (MO encoder) has been shown in our previous paper. In this paper, an error corrected recording method to improve accuracy of the MO encoder is described. The recording method utilizes one feature of MO encoder, that is, ability for re-recording. First, an initial recording is made directly from referential encoder to MO encoder and angular errors of the MO encoder are measured. According to the errors, correcting values for canceling the errors are calculated based on Fourier components analysis. Finally, the MO encoder is re-recorded by the correcting values after erasing the initial recording. As the result of experiments, an accuracy of 1.3" for 2250 pulse/rev. and 1.7"for9000 pulse/rev. was achieved by using the error corrected recording method.