研磨ロボット用光学的表面粗サセンサの研究 (第2報)

実験結果

抄録

In-process measurement of surface roughness is an important factor in automatic precise polishing. The authors have proposed a new optical method to evaluate roughness of polished metallic surface. By applying a Torrance-Sparrow model, it is theoretically shown that the variance of the intensity of the reflected light is given as the summation of that of the light source and the rms value of the surface roughness.
In order to insure that the proposed method is effective, some experiments have been carried out. The test pieces were made by brass. From the results of the experiments, the measured surface roughness agree quite well with the root-mean-square roughness represented in R_q (roughness in root mean square) measured by a stylus roughness meter.