A highly accurate, non-destructive and high speeding surface profile measuring system based on wavelength scanning interferometry has been developed. Main components of this system include a compact interferometer based on Michelson interferometry, an electronically tuned Ti: Sapphire laser for wide range wavelength scanning, and a high speeding multi-port CCD camera functioning as a detector. Prior researches have provided evidence that this system is able to measure the surface of an object for a 5×2.5 mm 2 area up to a measurement range of 1.5 mm within 4 seconds. In addition, the data processing procedures are used to reduce noise and interpolate signal, which improves the depth resolution to the degree of less then 3 μm. The accuracy of the measurement of wavelength scanning interferometry is directly influenced by the scanning accuracy of wavelength. This study investigates the accuracy of wavelength scanning by employing two methods that are designed for calibrating systematic error. The experimental results are used to evaluate the performance of the two calibrating methods.
