顕微作業用XYΘ小型自走機械の開発(第2報) 円弧動作の解析と動作実験

淵脇 大海; 庄司 裕一; 青山 尚之

doi:10.2493/jjspe.69.69

顕微作業用XYΘ小型自走機械の開発(第2報)

円弧動作の解析と動作実験

淵脇大海, 庄司裕一, 青山尚之

著者情報

ジャーナルフリー

2003 年 69 巻 1 号 p. 69-73

DOI https://doi.org/10.2493/jjspe.69.69

詳細

発行日: 2003/01/05 受付日: 2002/06/27 J-STAGE公開日: 2009/04/10 受理日: - 早期公開日: - 改訂日: -
訂正情報
訂正日: 2009/04/10 訂正理由: - 訂正箇所: 論文抄録訂正内容: Wrong : In order to provide microscopic manipulation, the unique locomotion mechanism which is composed of four piezo elements and two electromagnets were proposed in the 1st report. Here two legs arranged on cross each other are connected by four piezo elements so that it can move in any directions, i.e. in the X and Y directions as well as rotate at the specified point precisely with the manner of inch worm. Moreover the combination of specified wave forms for piezo elements can provide "arc trajectory motion", that is important for the micro manipulator to keep its tip end within the microscopic area. In this paper, we analyse the arc trajectory motion and design the signals of each actuator, and then we checked its motion accuracy and precise dexiterity by the CCD camera based image tracker. Finally, we confirmed that the robot can move the arc trajectoy motion with respect to any center point precisely.
Right : In order to provide microscopic manipulation, the unique locomotion mechanism which is composed of four piezo elements and two electromagnets were proposed in the 1st report. Here two legs arranged on cross each other are connected by four piezo elements so that it can move in any directions, i.e. in the X and Y directions as well as rotate at the specified point precisely with the manner of inch worm. Moreover the combination of specified wave forms for piezo elements can provide “arc trajectory motion”, that is important for the micro manipulator to keep its tip end within the microscopic area. In this paper, we analyse the arc trajectory motion and design the signals of each actuator, and then we checked its motion accuracy and precise dexiterity by the CCD camera based image tracker. Finally, we confirmed that the robot can move the arc trajectoy motion with respect to any center point precisely.

訂正日: 2009/04/10 訂正理由: - 訂正箇所: 引用文献情報訂正内容: 訂正前 : 1) 青山尚之,加藤秀剛:小型自走機械群による超精密生産機械システム(第2報)?精密点描加工と遠隔制御?,精密工学会誌,64,12(1998)1796.
6) 淵脇大海,庄司裕一,T.Chomchana,青山尚之:顕微作業用XYθ小型自走機械の開発(第1報)?機構の開発と基本動作?,精密工学会誌,68,3(2002)403.

訂正後 : 1) 青山尚之,加藤秀剛:小型自走機械群による超精密生産機械システム(第2報)?精密点描加工と遠隔制御?,精密工学会誌,64,12(1998)1796.
6) 淵脇大海,庄司裕一,T.Chomchana,青山尚之:顕微作業用XYθ小型自走機械の開発(第1報)?機構の開発と基本動作?,精密工学会誌,68,3(2002)403.

抄録

In order to provide microscopic manipulation, the unique locomotion mechanism which is composed of four piezo elements and two electromagnets were proposed in the 1st report. Here two legs arranged on cross each other are connected by four piezo elements so that it can move in any directions, i.e. in the X and Y directions as well as rotate at the specified point precisely with the manner of inch worm. Moreover the combination of specified wave forms for piezo elements can provide “arc trajectory motion”, that is important for the micro manipulator to keep its tip end within the microscopic area. In this paper, we analyse the arc trajectory motion and design the signals of each actuator, and then we checked its motion accuracy and precise dexiterity by the CCD camera based image tracker. Finally, we confirmed that the robot can move the arc trajectoy motion with respect to any center point precisely.

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