真空環境用静電リニアモータの開発

抄録

Electrostatic linear motor for vacuum environment is reported in this paper. The authors have developed high-power electrostatic linear motor called Dual Excitation Multiphase Electrostatic Drive (DEMED). DEMED is a linear synchronous motor and consists of pairs of thin plates. It possesses a power per weight ratio of 230W/kg and acceleration of over 100G in open loop systems. These performances are higher than those of typical electromagnetic drives. Previously, DEMED has been studied in dielectric liquid environment. In this study, DEMED for vacuum environment is fabricated, and its characteristics in vacuum environment is investigated. The fabricated motor equips mechanical guides for vacuum environment and a function of built-in position sensor. Estimated maximum force density of 2.82kN/m ² at driving voltage of 3.4kV is obtained through experiments under pressure of 10 ^-4Pa Capability of electrostatic motor application in vacuum environment is verified.