弾性率・表面エネルギー・摩擦力の同時評価法の提案とフラーレン薄膜への応用
2003 年 69 巻 5 号 p. 736-740
詳細
2003 年 69 巻 5 号 p. 736-740
The material properties of thin films (C 60, CN and TiN) are studied using a homebuit surface force apparatus (SFA). Elastic modulus and surface energy of these films are derived from the load-contact area relationship, based on the continuum elastic theory. The elastic modulus and surface energy of C 60 thin films 3-50 nm in thickness almost remain constancy and are estimated to be 9.0±3 GPa and 40 mN/m, respectively, which is in agreement with those of C 60 thick films. The method proposed in this paper is applicable for an ultrathin film 3 nm in thickness, although the conventional method such as a nanoindentor are not possible. Furthermore, the elastic modulus (surface energy) of a CN film 36 nm in thickness and a TiN film 46 nm in thickness are estimated to be 82±10 GPa(34 mN/m) and 104±10 GPa (13 mN/m), respectively.
