解説
反応性プラズマを援用したセラミックス材料のダメージフリー形状創成・仕上げ加工技術の開発
2018 年 65 巻 10 号 p. 654-658
詳細
2018 年 65 巻 10 号 p. 654-658
We are developing plasma nanoManufacturing process based on atmospheric pressure plasma process. This process consists of plasma CVM technique for shape creation and plasma-assisted polishing technique for surface finishing, and it makes it possible to create an arbitrary shape with nanometer order shape accuracy without forming subsurface damage. In this article, we introduce the outline of plasma nanoManufacturing process and some results.
