抄録
Ion implantation into metals is a useful technique for the improvement of wear resistance and corrosion inhibition of metals. In this report, both micro- and macro-characteristics of implanted metals are reviewed. Ti-implantation into steels results in the formation of Fe-Ti-C alloys, which improve the wear and corrosion resistances. N- and B-implantations in steels improving the wear resistance are useful for practical applications. N-implantation into Al produces AIN layers by "Self-Ion Beam Induced Crystallization" process, which plays an improtant role for formation of NbN and TiN. Lastly ion beam mixing is introduced as the related technique to ion implantation.
