Laser Forming of Thin Film Metallic Glass

抄録

Palladium based thin film metallic glasses were plastically bent by laser forming process. Thin films of Pd₇₇Cu₆Si₁₇ with a thickness of 0.028mm and Pd₄₀Ni₄₀P₂₀ with a thickness of 0.017mm were used for specimen. A 50W YAG laser was employed for forming. Variation of bending angle was investigated by changing working conditions such as laser power, laser operation mode (continuous wave and Q-switch pulsed modes), Q-sw frequency, scanning velocity and scanning number. From the experimental results, both thin films of Pd₇₇Cu₆Si₁₇ and Pd₄₀Ni₄₀P₂₀ were successfully bent for more than 85°. The formed thin films did not crystallize but were amorphous. As scanning number increased, bending angle also increased but increasing rate decreased. When laser power and scanning velocity were changed, bending angle had a peak. When Q-sw frequency was changed, bending angle had a broad peak in Pd₇₇Cu₆Si₁₇ case, but that was larger as frequency was smaller in Pd₄₀Ni₄₀P₂₀ case.