抄録
A systematic experiment on xenon ion implantation into permalloy films was made in order to understand the effects of implantation of heavy inert ions on microstructures and magnetic properties. Xenon ion implantation always caused crystallization of the partially epitaxially grown permalloy film, so that the grain size increased. In addition, spherical bubbles were clearly observed even at low fluence in slightly defocussed TEM image. The bubble size varied to several 10 A with the fluence. In an electron diffraction pattern a weak extra halo ring became visible when the fluence exceeded about 6×1016/cm2. Magnetization measurement showed a large decrease in Ms and Meff when the fluence increased. Origin of the decrease of magnetization was discussed in relation to xenon bubble formation, and is probably attributable to a decrease of magnetization of permalloy atoms on the bubble surface.
