抄録
CoOx thin films with perpendicular magnetic anisotropy (PMA) were prepared at room temperature by the reactive targets facing type of sputtering. We investigated their PMA, coercivity and static magnetization process. The results are as follows: (1) CoOx thin films with columnar structure are composed of hcp Co and fcc CoO. (2) The highest perpendicular anisotropy energy (Ku) reaches 2.3×106 erg/ cm3. Ku increases with an increase of Ms. PMA in the CoOx thin films being attributed to the magnetocrystalline anisotropy of Co. (3) Hc⊥ increases with a decrease of the columnar diameter of CoOx thin films. (4) Dependence of Hc⊥ on the direction of the applied magnetic field is similar to that expected from the Stoner-Wohlfarth model. The static magnetization process in CoOx thin films is mainly of by rotational type.
