日本応用磁気学会誌
Online ISSN : 1880-4004
Print ISSN : 0285-0192
ISSN-L : 0285-0192
薄膜
光照射フェライトメッキ法によるFe3O4膜の表面平滑性と膜推積速度
堀 誠一郎伊藤 友幸阿部 正紀玉浦 裕
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ジャーナル オープンアクセス

1991 年 15 巻 2 号 p. 339-342

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抄録
Polycrystalline Fe3O4 films were deposited by ferrite plating, irradiating the substrate surface with an Xe-lamp (350 W) and using FeCl2 and NaNO2 as reaction solution and oxidizing solutions, respectively. When the concentration of FeCl2 is high the surface of the film is rough having grains 0.2∼0.4 μm in size. As the concentration of FeCl2 decreases the surface smoothness improves but the deposition rate of the film decreases. Adding dextran [(C6H10O5)n, n=1200∼1800] into the reaction solution improves the surface smoothness without decreasing the deposition rate much.
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© 1991 (社)日本応用磁気学会
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