Fe-X-N(X=Zr, Hf, Nb, Ta)薄膜の磁気特性

抄録

To obtain ultra fine grains of α-Fe sputtered films of Fe-X-N (X=Zr, Hf, Nb, Ta), ternary systems in which each element X had strong affinity for nitrogen and ability of amorphous formation were prepared and the dependence of soft magnetic properties on composition of films was investigated. Good soft magnetic properties and high saturation flux density B_s were obtained in each system. In particular, Fe-Zr-N and Fe-Hf-N systems had a widespread soft magnetic region and exhibited zero magnetostriction and high B_s up to 16 kG at a certain composition.