抄録
Microstructures and magnetic properties of Fe- (Ta, Nb, Zr)-N alloy films near the eutectic composition were studied. These new soft magnetic alloy films were prepared by N2 reactive sputtering. The structures and magnetic properties were changed by annealing or adjusting N2 partial pressure ratio. The film structures were investigated with X-ray diffraction and TEM, and the following results were obtained. (i) the as prepared films; amorphous like phase, (ii) the annealed films; homogeneous mixture of fine-grained α-Fe and (Ta, Nb, Zr) nitrides, (iii) the films annealed at higher temperatures; composite of grown grains of α-Fe and (Ta, Nb, Zr) nitrides. Among these films, the films (ii) exhibit good soft magnetic properties, small magnetostriction and high saturation magnetization up to 1.6 T. Furthermore, Fe-Ta-Zr-N alloy films show higher thermal stability of the soft magnetic properties.
