HYDROGENATED i-CARBON PROPERTIES FOR THIN FILM DISK

抄録

  Carbon film sputtered in hydrocarbon atmosphere for overcoat of thin film disk was studied. Hardness of the film and hydrogen content in the films were measured. Hardness of the films decreased with increasing hydrogen pressure in sputtering. A lot of hydrogen atom were detected in the films. Ramman spectroscopy investigation clarified that the film has almost same spectrum to i-carbon. On CSS test, friction coefficient value of hydrogenated carbon films with liquid lubricant is lower than the value of standard sputtered carbon. However ordinary sputtered carbon films without lubricant show better CSS characteristics than i-carbon. So, it seems that carbon with hydrogen films may have rather strong adhesive force to lubricant.