レーザーアブレーション法によるFe膜の作製

抄録

Fe thin films were deposited on glass substrate using a pulsed Nd-YAG laser (λ= 1.06 μm, τ=250 μs). SEM observation showed that these films were mainly formed with fine crystallites less than 200Å, and there scatteringly existed macroscopic particles of which size depended on energy density. The streak image of plume using image converter camera showed that most of ablated particles concerned with film formation, had a velocity of more than 10⁴ cm/s. Saturation magnetic moment of the film was very close to bulk value and perpendicular magnetic anisotropy was not observed through torque measurement.