抄録
CoCrTa/Cr magnetic films on Si(100) substrates with and without HF pre-treatment were prepared by dc magnetron sputtering. It was found that the coercivity was increased by HF pre-treatment of the Si substrate for Cr underlayers of various thicknesses. The microstructure analyses of the magnetic films using XRD. FE-SEM,and TEM showedthat the crystallinity and the orientation of the c-axis in the film plane were enhanced and that the grain size was increased by HF pre-treatment.
