抄録
We developed a new frequency modulation (FM) - type MI sensor using amorphous wires and CMOS inverter chips for high sensitivity and low power consumption, suitable for construction of a wireless micro magnetic sensor. A sensitive, stable FM MI sensor was constructed by connecting the output terminal of a CMOS MI sensor to the power terminal of the single CMOS inverter oscillator. A change in oscillation frequency of 64 %/Oe at around 3 MHz was sensed with a resolution of about 10-4 Oe for a dc field of ± 1 Oe full scale. Wireless metering characteristics of the FM MI sensor were examined. Oscillation characteristics were also analyzed.