抄録
Corona discharge air ionizers have been used to neutralize the static electricity charged on the electronic devices in inspection process. The neutralization characteristics, that is the neutralizing current density ( JW ) and the electric field ( EW) at work area depend on the operation conditions. The emitter voltage is one of the most important operating conditions of the corona discharge air ionizer. The effect of emitter voltage on the neutralization characteristics were investigated in a mini-environment in which laminar air flow of 0.3 m/s exists. The air ionizer was operated by a square-wave alternating voltage ranging from 12 to 18 kVPP. The neutralizing current density ( JW) increased with increasing the emitter voltage. However, the electric field ( EW) acting as a noise in inspection process also increased with increasing the emitter voltage. The ratio of neutralizing current to electric field ( JW / EW) increased and showed saturation tendency with increasing the emitter voltage.
