In this paper, we propose the design guideline of the micro force sensor that becomes important as a force measurement method with a semiconductor strain gauge. The range of the force can be measured is from μN to N, and we controlled the stress applied to the sensor by devising the sensor structure. We developed three types of force sensor to cover such a wide range. The force sensor to measure μN level of force has the cantilever structure, which can transmit the minute force effectively. The force sensor for mN range force is pressure sensor type, and the force can be measured as pressure through the transmission medium to avoid breakage. The force sensor for N range force adopted a new method that the force is directly applied to the diaphragm. We designed each type of sensor based on simulation, and enabled the output voltage range to mV/V regardless of the type. Then we made the prototypes (Maicrogrippar, Catheter Touch Sensor, and Belt Tension Sensor) that applied each sensor. As a result, we verifie the effectiveness of our design guideline for micro sensors to measure several ranges of force.
