Journal of Surface Analysis
Online ISSN : 1347-8400
Print ISSN : 1341-1756
ISSN-L : 1341-1756
Serial Lecture
Introduction to Ion Beam Analysis (I) (HEIS, MEIS, LEIS) (2)
K. Sasakawa
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JOURNAL FREE ACCESS

2007 Volume 14 Issue 1 Pages 49-58

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Abstract

  As an introduction of the ion beam analysis, I will introduce the elementary aspects of ion scattering analysis method of HEIS, MEIS and LEIS. I will explain these four important concepts, kinematic factor, scattering cross section, stopping power, and energy struggling.

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© 2007 The Surface Analysis Society of Japan
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