We measured the transmission of the cylindrical mirror analyzer (CMA) by using a mini-electron gun consisting of a tungsten hairpin cathode set at the sample position. The electron beam current (i_in) entering the CMA was measured using a retractable Faraday cup and an electrometer. The electrons get through the CMA and finally the detected current (i_out) representing only a fraction of the input current was measured using another Faraday cup (normally used for detecting Auger electrons) and another electrometer. The ratio of the i_out to i_in gives the transmission of the CMA. Besides the experiment, we simulated the transmission characteristics, i.e., peak heights, position, and full width at half maximum, assuming thermionic emission and Gaussian peak shape. The simulation revealed characteristics that the experiments would not show explicitly. An optical transmission measurement was performed as well providing a good agreement with the results of the present electron beam measurements.

  This paper describes the backscattering correction for Auger quantitative surface analysis. The energy and electron incident angle dependence of backscattering coefficient for 10 elemental solids (Be, B, C, Al, Si, Cu, Zr, Ag, La, Au) were investigated using Monte Carlo (MC) simulations. In conclusions, the backscattering coefficient η_α at incident angle α could be described as

      η_α=(0.01η₀^−1.1+0.84)[η₀/(0.01η₀^−1.1+0.84)]^cosα

where η₀ is the backscattering coefficient at incident angle 0°. The Love-Scott equation [J. Phys. D 11, 106 (1978)] for η₀ was superior to the others in wide incident energy range. Using these backscattering coefficient equations, we have proposed an improved equation for backscattering correction in Auger electron spectroscopy, which can be used for wide incident energy range (3-30 keV) and incident angles (0-60°). The parameters in the equation were determined from the curve fit to the backscattering factors at normal incident angle in the 3, 5, 7.5 and 10 keV electron incident energy calculated by Ichimura-Shizimu [Surf. Sci. 112, 386 (1981)] with MC method. The root mean square (RMS) differences for backscattering factors for 10 elemental solids calculated by Monte Carlo method using continuous slowing down approximation and those from proposed equation were less 3% in the 10-30 keV (over-voltage ratio U=1.5-100 and incident angle α=0-60°). In the 3-10 keV energy range, we have also compared the proposed equation to the calculated values at incident angle 30 and 45° by Ichimura-Shimizu with MC method. We found that they coincide well each other. Then, the proposed equation for backscattering correction could be applied to the quantitative Auger analysis in wide analytical conditions.

  The basic characteristics arid the design principles of energy analyzers commonly used in electron spectroscopy are discussed, mainly from an electron optical point of view. Combined effect of energy dispersion and convergent lens action is the essence of the operation of energy analysers; these are the main factors which contribute to the resolution and sensitivity of spectrometers.

  As an introduction of the ion beam analysis, I will introduce the elementary aspects of ion scattering analysis method of HEIS, MEIS and LEIS. I will explain these four important concepts, kinematic factor, scattering cross section, stopping power, and energy struggling.

  The high voltage generation, measurements, and calibration were described. Measurements of 10 ppm in uncertainty for an AES was attained. This was achieved by compensating a temperature coefficient and accounting a power coefficient of the resistors. A standard high-voltage of about 100 V which can be used in a high-voltage work was obtained with Zener diodes. An idea for the PC programmable instruments of the old instruments was proposed.