2007 年 14 巻 2 号 p. 104-117
The ISO/TC201 (Technical Committee of Surface Chemical Analysis)/SC3 (Data Management and Treatment) has proposed the algorithms of peak detection in XPS spectra. In order to evaluate these methods, we have developed a set of XPS spectra as an activity in VAMAS (The Versailles project on Advanced Materials and Standards)/TWA2 (Surface Chemical Analysis) committee. The artificial three kinds of XPS spectra were generated from the measured XPS spectra. Based on these spectra we have developed an additional set of 30 spectra that have the superposed statistically defined noises. Using this data set, we have also carried out the evaluation of the programs for the XPS peak detection, which provided by ISO TC201 SC3. In conclusion, we found many problems on the provided software that must be due to the use of un-appropriate parameters. In this software, it is impossible to select the other parameters because SC3 committee does not open its algorithm completely. Then, we concluded that the provided software is premature for practical use in XPS peak detection.
