Paper
Auger Crater Edge Profiling by Water Droplet Impact
2008 年 15 巻 2 号 p. 172-176
詳細
2008 年 15 巻 2 号 p. 172-176
The charged water droplets used in electrospray droplet impact (EDI) are extremely large cluster ions with masses of about a few 106 u. When a target is etched by EDI, the physical sputtering of the target does not take place to the recognizable extent. The etched surfaces of TiO2 thin film on Si(100) by EDI were evaluated by AES crater edge profiling. We found that TiO2 thin film do not suffer from de-oxygenation by EDI etching.
