Energy and Direction Resolved Secondary Electron Imaging Using Fountain Detector

抄録

We have been advocating so-called “Fountain Detector (FD)” for low energy secondary electron (SE) detection in scanning electron microscope (SEM). FDs are simple but easily expanded not only energy filtered but also angle filtered SE image detection. In this presentation, we review our results of energy filtered images of p-n junction of SiC and Si₃N₄ nanostructures. Then, we show the recent design of plain angle / directional filter for standard fountain detector and its performance.