Journal of Surface Analysis
Online ISSN : 1347-8400
Print ISSN : 1341-1756
ISSN-L : 1341-1756
Extended Abstracts from 8th International Symposium on Practical Surface Analysis (PSA19)
Development of Ambient Pressure Hard X-ray Photoelectron Spectroscopy at SPring-8
Yasumasa Takagi
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2019 年 26 巻 2 号 p. 158-159

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An ambient pressure photoelectron spectroscopy measurement that uses with hard X-rays (AP-HAXPES) were conducted at the BL36XU of SPring-8. The AP-HAXPES system with a commercial differential pumping-type spectrometer (R4000 HiPP-2, Scienta Omicron Inc.) was installed in the beamline with the excitation light of 7.94 keV focused to a beam size of 20 μm × 20 μm on the sample position. In this report, we replaced the front cone with our home-made one with an aperture diameter of 30 µm to increase the pressure limit in the AP-HAXPES measurement, although the standard aperture size in the spectrometer is a diameter of 300 μm. In addition, we have adopted the working distance of 60 μm in order not to perturb the gas environment at the sample surface. Using the windowless electron spectrometer system, we have succeeded in measuring X-ray photoelectron spectra under real ambient atmosphere (105 Pa).
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© 2019 by The Surface Analysis Society of Japan
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