抄録
The Monte Carlo (MC) approach is a universal tool for describing electron transport in condensed matter and for developing descriptive formulas applicable to quantitative applications of XPS and other electron spectroscopies. Any MC simulation strategy requires implementation of samplers that generate certain parameters that are needed for determining an electron trajectory in the surface region of a sample material. Two parameters are of considerable importance in MC strategies: (i) the cross sections for elastic scattering of electrons by atoms in the surface region, and (ii) the inelastic mean free path (IMFP) of electrons in the sample material.