特集 「特殊環境適用技術」
耐熱性磁性流体およびこれを用いた磁性流体真空シール
キーワード:
magnetic fluid,
ferro fluid,
vacuum seal,
heat resistance,
semiconductor-manufacturing processes
2018 年 26 巻 4 号 p. 511-515
詳細
2018 年 26 巻 4 号 p. 511-515
We have developed a magnetic fluid with greatly improved heat resistance as compared with conventional products by optimizing the molecular weight of base oil and surfactant. In addition, it has also excellent corrosion resistance, ultra-low vapor pressure and low outgassing. These excellent properties make it ideal for magnetic fluid seal used under extreme conditions such as in various semiconductor-manufacturing processes with about 10 times longer service life than conventional products.
