2023 年 31 巻 2 号 p. 84-89
An inchworm-type micro-motion robot (inchworm) is studied for the application of positioning devices or moving mechanism in a small production system. The inchworm consists of electromagnets for clamp mechanism and piezoelectric actuators for moving mechanism, and has an unlimited operating area based on the principle of the inchworm. The drive frequency of the inchworm is limited by the transient phenomenon of the electromagnets and piezoelectric actuator. In this paper, the displacement of the piezoelectric actuator is extended by considering the strain characteristic of the piezoelectric actuator, which increases the velocity of the inchworm. By the use of the strain characteristic called butterfly curve, the displacement in a single control cycle is improved. The details of the strain characteristic by rectangular waves and the control of inchworm with piezoelectric butterfly curve are described. The control voltage applied to the piezoelectric actuator is determined experimentally, the deformation of the piezoelectric actuator in one control cycle is increased, and some experimental results show the improvement of the displacement of the inchworm.