The 76th JSAP Autumn Meeting 2015
Session ID : 15a-4E-2
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 76
Location : [in Japanese]
Date : September 13, 2015 - September 16, 2015
X-ray reflecting demonstration in 12 inch Si wafer optics produced by MEMS Tech.
*Masaki NUMAZAWA, Yuichiro Ezoe, Kumi Ishikawa, Tomohiro Ogawa, Mayu Sato, Kasumi Nakamura, Takaya Ohashi, Kazuhisa Mitsuda, Ryutaro Maeda, Hiroshi Hiroshima, Yuichi Kurashima, Daiji Noda
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