The 76th JSAP Autumn Meeting 2015
Session ID : 15a-4E-3
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 76
Location : [in Japanese]
Date : September 13, 2015 - September 16, 2015
Current state of development of X-ray optics system using Silicon dry etching
*Kasumi Nakamura, Yuichiro Ezoe, Kumi Ishikawa, Tomohiro Ogawa, Mayu Sato, Masaki Numazawa, Kazuma Takeuchi, Masaru Terada, Takaya Ohashi, Kazuhisa Mitsuda, Yuichi Kurashima, Hideki Takagi
Author information
Keywords:
15a-4E-3,
Silicon dry etching
Details
Article 1st page
