The 63rd JSAP Spring Meeting 2016
Session ID : 22a-W611-2
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 63
Location : [in Japanese]
Date : March 19, 2016 - March 22, 2016
Low-temperature Formation of a-IGZO Thin Film Transistors with Plasma Enhanced Reactive Sputtering
Yuichi Setsuhara, Keitaro Nakata, Yoshikatsu Satake, *Kosuke Takenaka, Giichiro Uchida, Akinori Ebe
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