The 63rd JSAP Spring Meeting 2016
Session ID : 22a-W611-3
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 63
Location : [in Japanese]
Date : March 19, 2016 - March 22, 2016
Mechanism Examination in Surface Roughness Improvement of VHF-DC Superimposed Magnetron Sputtering
Keywords:
22a-W611-3,
Sputtering
Details
Article 1st page
