The 63rd JSAP Spring Meeting 2016
Session ID : 19p-W621-11
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 63
Location : [in Japanese]
Date : March 19, 2016 - March 22, 2016
Study of etching mechanism of transition metal using neutral beam enhanced complex reaction based on tight-binding quantum chemical molecular dynamics
Details
Article 1st page
