The 77th JSAP Autumn Meeting 2016
Session ID : 16a-B10-1
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 77
Location : [in Japanese]
Date : September 13, 2016 - September 16, 2016
Formation of shallow junctions with high activation in n+/p and p+/n Ge using ion implantation and FLA
*Hideaki Tanimura, Hikaru Kawarazaki, Shinichi Kato, Takayuki Aoyama, Ippei Kobayashi, Hiroshi Onoda, Yoshiki Nakashima, Tsutomu Nagayama, Nariaki Hamamoto, Shigeki Sakai
Author information
Details
Article 1st page
