The 64th JSAP Spring Meeting 2017
Session ID : 17a-301-7
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 64
Location : [in Japanese]
Date : March 14, 2017 - March 17, 2017
Evaluation of Filled Defect States for SiO2/4H-SiC grown by dry and N2O oxidation
*Hiromasa Watanabe, Akio Ohta, Mitsuhisa Ikeda, Katsunori Makihara, Mori Daisuke, Yutaka Terao, Seiichi Miyazaki
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