JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 64th JSAP Spring Meeting 2017
Session ID : 17a-301-12
Conference information

Host: The Japan Society of Applied Physics

Name : JSAP Spring Meeting

Number : 64

Location : [in Japanese]

Date : March 14, 2017 - March 17, 2017

Substrate Effect on Insulating Characteristics of TEOS - CVD - SiO2 Film
*Hiroaki Kawamura, Kanta Maeda, Ryu Hasunuma, Kikuo Yamabe
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Keywords: 17a-301-12, SiC, insulating film, TEOS - CVD
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