The 79th JSAP Autumn Meeting 2018
Session ID : 20p-438-3
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 79
Location : [in Japanese]
Date : September 18, 2018 - September 21, 2018
Atomic-layer etching (ALE) of magnetic films by Hexafluoroacetylacetone (HFAC) molecules
*Abdulrahman Hikmat Basher, Michiro Isobe, Tomoko Ito, Masato Kiuchi, Take Takeuchi, Kazuhiro Karahashi, Ikutaro Hamada, Yoshitada Morikawa, Satoshi Hamaguchi
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