JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 79th JSAP Autumn Meeting 2018
Session ID : 20p-438-3
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Atomic-layer etching (ALE) of magnetic films by Hexafluoroacetylacetone (HFAC) molecules
*Abdulrahman Hikmat BasherMichiro IsobeTomoko ItoMasato KiuchiTake TakeuchiKazuhiro KarahashiIkutaro HamadaYoshitada MorikawaSatoshi Hamaguchi
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© 2018 The Japan Society of Applied Physics
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